LOAD PORT AND LOAD PORT ATMOSPHERE REPLACING METHOD

• Main Authors: OKUTSU Hidekazu, SAKATA Katsunori
• Format: Patent
• Language: English
• Published: 22.06.2017
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Provided is a load port capable of loading and unloading a substrate by a transfer robot in a state where a purge gas atmosphere is maintained inside a substrate storage space. After the lid of the substrate storage container is opened, an opening portion of the substrate storage container is closed by a frame sealing a peripheral edge of the opening portion of the substrate storage container and a shutter portion where a plurality of shielding plates are disposed in a vertical direction at a third position which is further moved forward from a release position. The shutter portion can locally move all or a portion of the shielding plates to form a narrow opening portion (third opening portion), and transferring of the substrate in the state where an atmosphere of the substrate storage space is replaced is performed through the narrow opening portion (third opening portion).