Single sensor type three-dimensional micro/nano contact trigger measuring probe

• Main Authors: Fan Kuangchao, Cheng Zhenying, Li Ruijun, Chen Chen
• Format: Patent
• Language: English
• Published: 22.06.2017
• Subjects: ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR; PHYSICS; TARIFF METERING APPARATUS; TESTING

A single sensor type three-dimensional micro/nano contact trigger measuring probe is provided which is characterized in respectively providing a probe unit and a measuring unit in the base. In the probe unit, the leaf spring is supported on the circular-ring base, a circular suspension plate is prov...