INSPECTION DEVICE, INSPECTION METHOD, AND IMAGE PROCESSING PROGRAM
An inspection device according to an embodiment includes a microscope, a storage section, an image processing section and an inspection section. The microscope is configured to obtain a primary image by capturing an inspection target. The storage section stores a function defining a relationship bet...
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| Main Author | |
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| Format | Patent |
| Language | English |
| Published |
09.03.2017
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| Subjects | |
| Online Access | Get full text |
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| Abstract | An inspection device according to an embodiment includes a microscope, a storage section, an image processing section and an inspection section. The microscope is configured to obtain a primary image by capturing an inspection target. The storage section stores a function defining a relationship between a low-resolution image and a high-resolution image of a calibration sample. The high-resolution image has smaller pixel size than the low-resolution image. The image processing section is configured to generate a secondary image based on the primary image by using the function. The secondary image has smaller pixel size than the primary image. The inspection section is configured to inspect the inspection target using the secondary image. |
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| AbstractList | An inspection device according to an embodiment includes a microscope, a storage section, an image processing section and an inspection section. The microscope is configured to obtain a primary image by capturing an inspection target. The storage section stores a function defining a relationship between a low-resolution image and a high-resolution image of a calibration sample. The high-resolution image has smaller pixel size than the low-resolution image. The image processing section is configured to generate a secondary image based on the primary image by using the function. The secondary image has smaller pixel size than the primary image. The inspection section is configured to inspect the inspection target using the secondary image. |
| Author | Naka Masato |
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| Notes | Application Number: US201615046841 |
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| RelatedCompanies | KABUSHIKI KAISHA TOSHIBA |
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| Snippet | An inspection device according to an embodiment includes a microscope, a storage section, an image processing section and an inspection section. The microscope... |
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| SubjectTerms | CALCULATING COMPUTING COUNTING IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS |
| Title | INSPECTION DEVICE, INSPECTION METHOD, AND IMAGE PROCESSING PROGRAM |
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