SEMICONDUCTOR DEVICE
Provided is a semiconductor device including a substrate, gate electrodes vertically stacked on the substrate, insulating patterns between the gate electrodes, an active pillar provided to penetrate the gate electrodes and the insulating patterns and electrically coupled with the substrate, and a me...
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Main Authors | , , , , , , , |
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Format | Patent |
Language | English |
Published |
01.12.2016
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Subjects | |
Online Access | Get full text |
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