SEMICONDUCTOR DEVICE

Provided is a semiconductor device including a substrate, gate electrodes vertically stacked on the substrate, insulating patterns between the gate electrodes, an active pillar provided to penetrate the gate electrodes and the insulating patterns and electrically coupled with the substrate, and a me...

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Bibliographic Details
Main Authors LEE CHANGSUB, LIM SEUNGHYUN, KANG DAEWOONG, KIM DAE SIN, HUR SUNGHOI, SON HOMIN, Kim Nambin, SEOL KWANG SOO
Format Patent
LanguageEnglish
Published 01.12.2016
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