SEMICONDUCTOR DEVICE
Provided is a semiconductor device including a substrate, gate electrodes vertically stacked on the substrate, insulating patterns between the gate electrodes, an active pillar provided to penetrate the gate electrodes and the insulating patterns and electrically coupled with the substrate, and a me...
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Format | Patent |
Language | English |
Published |
01.12.2016
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Subjects | |
Online Access | Get full text |
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Abstract | Provided is a semiconductor device including a substrate, gate electrodes vertically stacked on the substrate, insulating patterns between the gate electrodes, an active pillar provided to penetrate the gate electrodes and the insulating patterns and electrically coupled with the substrate, and a memory pattern provided between the gate electrodes and the active pillar and between the insulating patterns and the active pillar. The gate electrodes include edge portions extending between the memory pattern and the insulating patterns. |
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AbstractList | Provided is a semiconductor device including a substrate, gate electrodes vertically stacked on the substrate, insulating patterns between the gate electrodes, an active pillar provided to penetrate the gate electrodes and the insulating patterns and electrically coupled with the substrate, and a memory pattern provided between the gate electrodes and the active pillar and between the insulating patterns and the active pillar. The gate electrodes include edge portions extending between the memory pattern and the insulating patterns. |
Author | KANG DAEWOONG KIM DAE SIN SON HOMIN SEOL KWANG SOO LIM SEUNGHYUN LEE CHANGSUB Kim Nambin HUR SUNGHOI |
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RelatedCompanies | KANG DAEWOONG KIM DAE SIN SON HOMIN SEOL KWANG SOO LIM SEUNGHYUN LEE CHANGSUB Kim Nambin HUR SUNGHOI |
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Snippet | Provided is a semiconductor device including a substrate, gate electrodes vertically stacked on the substrate, insulating patterns between the gate electrodes,... |
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SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
Title | SEMICONDUCTOR DEVICE |
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