PARTICLE DETECTION APPARATUS AND PARTICLE DETECTION METHOD

A particle detection apparatus includes a plurality of photodetectors that detect reaction light generated at a particle irradiated with inspection light and generate electric signals in respective channels; pulse detectors that detect pulses of the electric signals in the respective channels; a cor...

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Bibliographic Details
Main Author MATSUURA Yuho
Format Patent
LanguageEnglish
Published 27.10.2016
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:A particle detection apparatus includes a plurality of photodetectors that detect reaction light generated at a particle irradiated with inspection light and generate electric signals in respective channels; pulse detectors that detect pulses of the electric signals in the respective channels; a correlating unit that correlates the pulse of the electric signal in a reference channel being a channel having a highest signal-to-noise (S/N) ratio, with the pulse of the electric signal in a channel other than the reference channel generated within a predetermined time difference range with respect to the pulse of the electric signal in the reference channel; and an attribute specifying unit that specifies an attribute of the particle on the basis of the correlated pulses of the electric signals.
Bibliography:Application Number: US201615134538