Pressure Sensor
A pressure sensor comprises a deformable measuring diaphragm, and a mating body connected in a pressure-tight manner and forms a measuring chamber in which a reference pressure is present. A pressure can be applied to an outside of the measuring diaphragm. The pressure sensor has a capacitive transd...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
20.10.2016
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Subjects | |
Online Access | Get full text |
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