Pressure Sensor

A pressure sensor comprises a deformable measuring diaphragm, and a mating body connected in a pressure-tight manner and forms a measuring chamber in which a reference pressure is present. A pressure can be applied to an outside of the measuring diaphragm. The pressure sensor has a capacitive transd...

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Bibliographic Details
Main Authors Textor Olaf, Wosnitza Elmar, Rossberg Andreas
Format Patent
LanguageEnglish
Published 20.10.2016
Subjects
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