PROCESS WINDOW ANALYSIS
A method for process analysis includes acquiring first inspection data, using a first inspection modality, with respect to a substrate having multiple instances of a predefined pattern of features formed thereon using different, respective sets of process parameters. Characteristics of defects ident...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
29.09.2016
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Subjects | |
Online Access | Get full text |
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