COMPOUND SPRING MEMS RESONATORS FOR FREQUENCY AND TIMING GENERATION

• Main Author: CLARK JOHN RYAN
• Format: Patent
• Language: English
• Published: 28.04.2016
• Subjects: BASIC ELECTRONIC CIRCUITRY; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS

A compound spring MEMS resonator includes a resonator body constructed using one or more spring unit cells forming a compound spring block and one or more compound spring blocks forming the resonator body. Each compound spring block is anchored at nodal points to ensure a high quality factor. The re...