LITHOGRAPHIC APPARATUS AND METHOD
A device manufacturing method includes conditioning a beam of radiation using an illumination system. The conditioning includes controlling an array of individually controllable elements and associated optical components of the illumination system to convert the radiation beam into a desired illumin...
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Main Authors | , , , , , , , |
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Format | Patent |
Language | English |
Published |
28.04.2016
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Subjects | |
Online Access | Get full text |
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