BOLOMETRIC DETECTOR WITH MIM STRUCTURES OF DIFFERENT DIMENSIONS

• Main Authors: BOUTAMI SALIM, POCAS STEPHANE, RABAUD WILFRIED, PALANCHOKE UJWOL
• Format: Patent
• Language: English
• Published: 31.03.2016
• Subjects: COLORIMETRY; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; PHYSICS; RADIATION PYROMETRY; TESTING

A bolometric detector of LWIR wavelengths, including: a substrate; a membrane suspended above the substrate by supporting elements; an absorbing element comprising several MIM structures each formed with a lower metal element, an upper metal element specific to each MIM structure and with a dielectr...