ARC EVAPORATION SOURCE
Provided is an arc evaporation source for melting and evaporating a cathode material by arc discharge for film formation on a surface of a substrate, and including a cathode formed in a substantially disc shape and a magnetic field generating apparatus, disposed at a back side of the cathode. The ma...
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Main Authors | , , , , |
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Format | Patent |
Language | English |
Published |
24.03.2016
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Subjects | |
Online Access | Get full text |
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