NONCONTACT METROLOGY PROBE, PROCESS FOR MAKING AND USING SAME

• Main Author: GORDON JOSHUA
• Format: Patent
• Language: English
• Published: 10.03.2016
• Subjects: CALCULATING; COMPUTING; COUNTING; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; PICTORIAL COMMUNICATION, e.g. TELEVISION; TESTING

Disclosed is a noncontact metrology probe including: a first camera including a first field of view; a second camera including a second field of view and arranged such that the second field of view overlaps the first field of view to form a prime focal volume; a third camera including a third field of view and arranged such that the third field of view overlaps the prime focal volume to form a probe focal volume; and a tracker including a tracker field of view to determine a location of the probe focal volume in the tracker field of view. Further disclosed is a process for calibrating a noncontact metrology probe, the process including: providing a noncontact metrology probe including: a first camera including a first field of view; a second camera including a second field of view; a third camera including a third field of view; and a tracker including a tracker field of view; overlapping the first field of view with the second field of view to form a prime focal volume; overlapping the prime focal volume with the third field of view to form a probe focal volume; and overlapping the a tracker field of view with the probe focal volume to calibrate the noncontact metrology probe.