CHARGED PARTICLE BEAM APPARATUS

• Main Authors: FUKUDA MUNEYUKI, IKEGAMI AKIRA, ENYAMA MOMOYO, SUZUKI NAOMASA, SHOJO TOMOYASU, DOHI HIDETO
• Format: Patent
• Language: English
• Published: 15.10.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY

In order to provide a charged particle beam apparatus capable of high resolution measurement of a sample at any inclination angle, a charged particle beam apparatus for detecting secondary charged particles (115) generated by irradiating a sample (114) with a primary charged particle beam (110) is p...