On-Chip RF Shields with Backside Redistribution Lines

• Main Authors: BEER GOTTFRIED, POHL JENS, KOERNER HEINRICH, BARTH HANS-JOACHIM
• Format: Patent
• Language: English
• Published: 22.01.2015
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Structures of a system on chip and methods of forming a system on chip are disclosed. In one embodiment, a method of fabricating the system on chip includes forming a through substrate opening from a back surface of a substrate, the through substrate opening disposed between a first and a second reg...