Translucent Hard Thin Film
A translucent hard thin film having high transmissivity and film strength is provided. The translucent hard thin film can be composed of a laminated film formed on a substrate surface, wherein the laminated film has a superlattice structure obtained by stacking a plurality of SiO2 layer and SiC laye...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
04.12.2014
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Subjects | |
Online Access | Get full text |
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