Translucent Hard Thin Film

A translucent hard thin film having high transmissivity and film strength is provided. The translucent hard thin film can be composed of a laminated film formed on a substrate surface, wherein the laminated film has a superlattice structure obtained by stacking a plurality of SiO2 layer and SiC laye...

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Bibliographic Details
Main Authors JIANG YOUSONG, SUGAWARA TAKUYA, SHIONO ICHIRO, AOSHIMA HIKARU
Format Patent
LanguageEnglish
Published 04.12.2014
Subjects
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