YAW-RATE SENSOR

A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscil...

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Main Authors GOMEZ UDO-MARTIN, KOHN OLIVER, NEUL REINHARD, HAUER JOERG, CLASSEN JOHANNES, MEISEL DANIEL CHRISTOPH, FRANKE AXEL, KUHLMANN BURKHARD, KEHR KERSTEN, OHMS TORSTEN
Format Patent
LanguageEnglish
Published 06.11.2014
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Summary:A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.
Bibliography:Application Number: US201414334407