MONOLITHIC SENSOR PACKAGE

A unitary sensor package having a magnetometer, accelerometer and gyroscope incorporated into a monolithic structure composed of one or more wafers or substrates. Pressure and/or other types of sensors can also be incorporated in the monolithic structure.

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Bibliographic Details
Main Authors CAI YONGYAO, ZAVRACKY PAUL M, ZHAO YANG
Format Patent
LanguageEnglish
Published 15.05.2014
Subjects
ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS
MEASURING
MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE
MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
PHYSICS
TARIFF METERING APPARATUS
TESTING
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Summary:A unitary sensor package having a magnetometer, accelerometer and gyroscope incorporated into a monolithic structure composed of one or more wafers or substrates. Pressure and/or other types of sensors can also be incorporated in the monolithic structure.
Bibliography:Application Number: US201213674506