Projection Exposure System and Projection Exposure Method

A projection exposure system includes an illumination system configured to illuminate a mask with radiation. The projection exposure system also includes a projection objective configured to project an image of a pattern of the mask onto a radiation-sensitive substrate. The projection exposure syste...

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Main Authors GRUNER TORALF, GRAESCHUS VOLKER, GRAUPNER PAUL, ULRICH WILHELM, ZACZEK CHRISTOPH, CONRADI OLAF, BEIERL HELMUT
Format Patent
LanguageEnglish
Published 18.07.2013
Subjects
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
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Abstract A projection exposure system includes an illumination system configured to illuminate a mask with radiation. The projection exposure system also includes a projection objective configured to project an image of a pattern of the mask onto a radiation-sensitive substrate. The projection exposure system further includes an angle-selective filter arrangement arranged at or close to a field surface of the projection objective in a projection beam path optically downstream of the object surface. The angle-selective filter arrangement is effective to filter radiation incident on the filter arrangement according to an angle-selective filter function.
AbstractList A projection exposure system includes an illumination system configured to illuminate a mask with radiation. The projection exposure system also includes a projection objective configured to project an image of a pattern of the mask onto a radiation-sensitive substrate. The projection exposure system further includes an angle-selective filter arrangement arranged at or close to a field surface of the projection objective in a projection beam path optically downstream of the object surface. The angle-selective filter arrangement is effective to filter radiation incident on the filter arrangement according to an angle-selective filter function.
Author BEIERL HELMUT
GRAESCHUS VOLKER
CONRADI OLAF
GRAUPNER PAUL
ULRICH WILHELM
GRUNER TORALF
ZACZEK CHRISTOPH
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GRAESCHUS VOLKER
CONRADI OLAF
GRAUPNER PAUL
ULRICH WILHELM
GRUNER TORALF
ZACZEK CHRISTOPH
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Snippet A projection exposure system includes an illumination system configured to illuminate a mask with radiation. The projection exposure system also includes a...
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SubjectTerms APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
Title Projection Exposure System and Projection Exposure Method
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