MODULAR-CONSTRUCTION VACUUM-COATING SYSTEM

A modular-construction vacuum-coating system includes a plurality of functional chambers arranged one behind the other along a longitudinal extent in which substrates are moved through the chambers in a substrate-transporting region. To lower the production-related and installation-related outlay in...

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Main Authors STRUEMPFEL JOHANNES, KLOOSS MATTHIAS, SMOLKE MATTHIAS, WOLF ANDREJ
Format Patent
LanguageEnglish
Published 06.06.2013
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Abstract A modular-construction vacuum-coating system includes a plurality of functional chambers arranged one behind the other along a longitudinal extent in which substrates are moved through the chambers in a substrate-transporting region. To lower the production-related and installation-related outlay involved in supplying media, a functional chamber, as a first sub-module, is arranged in a first module and provided with an outer interface which is the same for at least a second module.
AbstractList A modular-construction vacuum-coating system includes a plurality of functional chambers arranged one behind the other along a longitudinal extent in which substrates are moved through the chambers in a substrate-transporting region. To lower the production-related and installation-related outlay involved in supplying media, a functional chamber, as a first sub-module, is arranged in a first module and provided with an outer interface which is the same for at least a second module.
Author SMOLKE MATTHIAS
STRUEMPFEL JOHANNES
KLOOSS MATTHIAS
WOLF ANDREJ
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STRUEMPFEL JOHANNES
KLOOSS MATTHIAS
WOLF ANDREJ
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Snippet A modular-construction vacuum-coating system includes a plurality of functional chambers arranged one behind the other along a longitudinal extent in which...
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SubjectTerms APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL
APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
PERFORMING OPERATIONS
SPRAYING OR ATOMISING IN GENERAL
TRANSPORTING
Title MODULAR-CONSTRUCTION VACUUM-COATING SYSTEM
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