METHODS FOR PLANARIZING A SEMICONDUCTOR CONTACTOR

A planarizer for a probe card assembly. A planarizer includes a first control member extending from a substrate in a probe card assembly. The first control member extends through at least one substrate in the probe card assembly and is accessible from an exposed side of an exterior substrate in the...

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Bibliographic Details
Main Authors MATHIEU GAETAN L, ELDRIDGE BENJAMIN N, GRUBE GARY W
Format Patent
LanguageEnglish
Published 11.08.2011
Subjects
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Summary:A planarizer for a probe card assembly. A planarizer includes a first control member extending from a substrate in a probe card assembly. The first control member extends through at least one substrate in the probe card assembly and is accessible from an exposed side of an exterior substrate in the probe card assembly. Actuating the first control member causes a deflection of the substrate connected to the first control member.
Bibliography:Application Number: US201113092709