SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

• Main Authors: UMEMURA NOBUAKI, ARIE HIROYUKI, HATTORI NOBUYOSHI, HARA KIMIO, ISHIKAWA MAKOTO, NITTA KYOYA, NAKANISHI NOBUTO
• Format: Patent
• Language: English
• Published: 30.12.2010
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

In a semiconductor device having an LDMOSFET, a source electrode is at the back surface thereof. Therefore, to reduce electric resistance between a source contact region in the top surface and the source electrode at the back surface, a poly-silicon buried plug is provided which extends from the upp...