ULTRA-WIDE ANGLE MEMS SCANNER ARCHITECTURE

• Main Authors: KHALIL DIAA A, HADDARA HISHAM
• Format: Patent
• Language: English
• Published: 21.10.2010
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; CINEMATOGRAPHY; COLORIMETRY; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT; MEASURING; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; PICTORIAL COMMUNICATION, e.g. TELEVISION; RADIATION PYROMETRY; TESTING

An optical microscanner achieves wide rotation angles utilizing a curved reflector. The optical microscanner includes a moveable mirror for receiving an incident beam and reflecting the incident beam to produce a reflected beam and a Micro Electro-Mechanical System (MEMS) actuator that causes a line...