Multiple-Substrate Transfer Apparatus and Multiple-Substrate Processing Apparatus
A multiple-substrate processing apparatus includes: a reaction chamber comprised of two discrete reaction stations aligned one behind the other for simultaneously processing two substrates; a transfer chamber disposed underneath the reaction chamber, for loading and unloading substrates to and from...
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Main Authors | , |
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Format | Patent |
Language | English |
Published |
17.06.2010
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Subjects | |
Online Access | Get full text |
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