YAW RATE SENSOR

• Main Authors: GOMEZ UDO-MARTIN, NEUL REINHARD, QUANDER MARCO, CLASSEN JOHANNES, FRANKE AXEL, KEHR KERSTEN
• Format: Patent
• Language: English
• Published: 07.01.2010
• Subjects: GYROSCOPIC INSTRUMENTS; MEASURING; MEASURING DISTANCES, LEVELS OR BEARINGS; NAVIGATION; PHOTOGRAMMETRY OR VIDEOGRAMMETRY; PHYSICS; SURVEYING; TESTING

A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second a...