METHOD OF MAKING A SEMICONDUCTOR ELEMENT

• Main Authors: GOLLER KLAUS, SCHEST TANJA
• Format: Patent
• Language: English
• Published: 11.06.2009
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A method of producing a capacitor that includes producing a first electrode having a first surface; forming a recess in an element, walls of the element and the first surface of the first electrode defining the recess, the element having a first surface exterior of the recess; forming a dielectric l...