Photo Diodes Having a Conductive Plug Contact to a Buried Layer and Methods of Manufacturing the Same

• Main Authors: NAM DONG-KYUN, BAE SUNG-RYOUL
• Format: Patent
• Language: English
• Published: 08.01.2009
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

Methods of manufacturing a photo diode include sequentially forming a buried layer of a first conductivity type, a first epitaxial layer of the first conductivity type, and a second epitaxial layer of a second conductivity type on a substrate. The second and first epitaxial layers are etched to form...