CARBON TUBE FOR ELECTRON BEAM APPLICATION
Embodiments of the present invention provide an apparatus employing an electron beam to expose the structure of a micro device and produce an image of the structure. The apparatus includes an electron gun producing the electron beam; an electron beam column having one or more segments that shape, fo...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
11.09.2008
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Subjects | |
Online Access | Get full text |
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Summary: | Embodiments of the present invention provide an apparatus employing an electron beam to expose the structure of a micro device and produce an image of the structure. The apparatus includes an electron gun producing the electron beam; an electron beam column having one or more segments that shape, focus and/or deflect the electron beams; and one or more center tubes along the electron beam column that provides a high vacuum environment for and guiding the electron beam to a target object coated with an electron sensitive resist. At least one of the center tubes is a carbon tube made of solid carbon material. |
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Bibliography: | Application Number: US20070683596 |