Method And Device For Producing High Purity Polycrystalline Silicon With A Reduced Dopant Content

• Main Authors: CROSSMANN IVO, ALTMANN THOMAS, SENDLINGER HANS-PETER
• Format: Patent
• Language: English
• Published: 14.02.2008
• Subjects: CHEMISTRY; COMPOUNDS THEREOF; INORGANIC CHEMISTRY; METALLURGY; NON-METALLIC ELEMENTS

In the batch production of high purity polycrystalline silicon, in which a U-shaped silicon carrier body is fastened in an open deposition reactor, the deposition reactor is hermetically sealed, the U-shaped carrier body is heated electrical current, a silicon-containing reaction gas and hydrogen ar...