Method of fabricating liquid crystal display device
A method of fabricating a liquid crystal display device includes the steps of forming a gate electrode and a gate line on a first substrate, forming a gate insulating layer on the gate electrode, forming an active layer on the gate insulating layer and an ohmic contact layer on the active layer, for...
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Main Author | |
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Format | Patent |
Language | English |
Published |
17.01.2008
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Subjects | |
Online Access | Get full text |
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Abstract | A method of fabricating a liquid crystal display device includes the steps of forming a gate electrode and a gate line on a first substrate, forming a gate insulating layer on the gate electrode, forming an active layer on the gate insulating layer and an ohmic contact layer on the active layer, forming source and drain electrodes spaced apart from each other and on the ohmic contact layer, forming a data line that crosses the gate line, etching a portion of the ohmic contact layer between the source and drain electrodes in a chamber of a dry-etching device to expose a portion of the active layer, forming a passivation layer on the first substrate which remains in the chamber, the passivation layer covering the portion of the active layer, forming a pixel electrode connected to the drain electrode, and interposing a liquid crystal layer between the pixel electrode and a second substrate. |
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AbstractList | A method of fabricating a liquid crystal display device includes the steps of forming a gate electrode and a gate line on a first substrate, forming a gate insulating layer on the gate electrode, forming an active layer on the gate insulating layer and an ohmic contact layer on the active layer, forming source and drain electrodes spaced apart from each other and on the ohmic contact layer, forming a data line that crosses the gate line, etching a portion of the ohmic contact layer between the source and drain electrodes in a chamber of a dry-etching device to expose a portion of the active layer, forming a passivation layer on the first substrate which remains in the chamber, the passivation layer covering the portion of the active layer, forming a pixel electrode connected to the drain electrode, and interposing a liquid crystal layer between the pixel electrode and a second substrate. |
Author | KIM HYO-UK |
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RelatedCompanies | LG.PHILIPS LCD CO., LTD |
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Snippet | A method of fabricating a liquid crystal display device includes the steps of forming a gate electrode and a gate line on a first substrate, forming a gate... |
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SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
Title | Method of fabricating liquid crystal display device |
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