INSPECTING APPARATUS AND METHOD

An inspecting apparatus and method of inspecting which provides an enhanced clearness. The inspecting apparatus includes a stage to support an article to be inspected, an optical microscope provided with an object lens to approach and withdraw from the stage to inspect the article, and a viewport le...

Full description

Saved in:
Bibliographic Details
Main Authors PYUN HEE-SOO, CHOI YONG-HO, BAEK DONG-SEOK, SUH JE-WAN, JEON BYEONG-HWAN
Format Patent
LanguageEnglish
Published 05.07.2007
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
Online AccessGet full text

Cover

More Information
Summary:An inspecting apparatus and method of inspecting which provides an enhanced clearness. The inspecting apparatus includes a stage to support an article to be inspected, an optical microscope provided with an object lens to approach and withdraw from the stage to inspect the article, and a viewport lens interposed between the article and the object lens to have a predetermined radius of curvature.
Bibliography:Application Number: US20060609924