Lithographic apparatus and device manufacturing method
A lithographic apparatus is provided that has a sensor at substrate level, the sensor including a radiation receiver, a transmissive plate supporting the radiation receiver, and a radiation detector, wherein the sensor is arranged to avoid loss of radiation between the radiation receiver and a final...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
14.06.2007
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Subjects | |
Online Access | Get full text |
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