Method and apparatus for precision coating of molecules on the surfaces of materials and devices
A method and apparatus for plasma treatment and deposition of ionized molecules on a surface of an object in a vacuum. The apparatus has a plasma treatment system including a plasma reactor chamber, an ion deposition system including an ion deposition chamber that is connected to the plasma reactor...
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Format | Patent |
Language | English |
Published |
15.02.2007
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Subjects | |
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Abstract | A method and apparatus for plasma treatment and deposition of ionized molecules on a surface of an object in a vacuum. The apparatus has a plasma treatment system including a plasma reactor chamber, an ion deposition system including an ion deposition chamber that is connected to the plasma reactor chamber, and a vacuum system for maintaining a vacuum in the chambers. The ion deposition system may include an ion guide chamber for guiding ionized molecule towards the target surface. A target guiding system moves the target surface between the plasma reactor chamber and the ion deposition chamber within the vacuum system through a gate, such that the target surface may be alternately subjected to plasma treatment and to deposition of ionized molecules without leaving the vacuum system. |
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AbstractList | A method and apparatus for plasma treatment and deposition of ionized molecules on a surface of an object in a vacuum. The apparatus has a plasma treatment system including a plasma reactor chamber, an ion deposition system including an ion deposition chamber that is connected to the plasma reactor chamber, and a vacuum system for maintaining a vacuum in the chambers. The ion deposition system may include an ion guide chamber for guiding ionized molecule towards the target surface. A target guiding system moves the target surface between the plasma reactor chamber and the ion deposition chamber within the vacuum system through a gate, such that the target surface may be alternately subjected to plasma treatment and to deposition of ionized molecules without leaving the vacuum system. |
Author | KITCHING KATHRYN J TURECEK FRANK RATNER BUDDY D LEE HAK-NO ELAM WILLIAM T |
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Snippet | A method and apparatus for plasma treatment and deposition of ionized molecules on a surface of an object in a vacuum. The apparatus has a plasma treatment... |
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SubjectTerms | BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
Title | Method and apparatus for precision coating of molecules on the surfaces of materials and devices |
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