Metal removal from solvent

• Main Authors: PIATT GREGORY F, GATOV MICHAEL S, WHITEFIELD BRUCE J
• Format: Patent
• Language: English
• Published: 13.04.2006
• Subjects: CLEANING; CLEANING IN GENERAL; PERFORMING OPERATIONS; PREVENTION OF FOULING IN GENERAL; TRANSPORTING

An apparatus for cleaning a substrate. A cleaning chamber contacts the substrate with a cleaning solution. The cleaning solution thereby removes contaminants from the substrate and additionally leaches material from the substrate. A gettering chamber receives the cleaning solution, and includes a su...