Method for fabricating a trench capacitor with an insulation collar which is electrically connected to a substrate on one side via a buried contact, in particular for a semiconductor memory cell

• Main Author: KUDELKA STEPHAN
• Format: Patent
• Language: English
• Published: 05.01.2006
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

The present invention provides a method for fabricating a trench capacitor with an insulation collar ( 10 ) in a substrate ( 1 ), which is electrically connected to the substrate ( 1 ) on one side via a buried contact, having the steps of: providing a trench ( 5 ) in the substrate ( 1 ) using a hard...