Structure and method for forming a dielectric chamber and electronic device including the dielectric chamber
A method (and structure) that selectively forms a dielectric chamber on an electronic device by forming a dummy structure over a semiconductor substrate, depositing a dielectric layer over the dummy structure, forming an opening through the dielectric layer to the dummy structure, and removing the d...
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| Main Authors | , , |
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| Format | Patent |
| Language | English |
| Published |
15.09.2005
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| Edition | 7 |
| Subjects | |
| Online Access | Get full text |
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| Abstract | A method (and structure) that selectively forms a dielectric chamber on an electronic device by forming a dummy structure over a semiconductor substrate, depositing a dielectric layer over the dummy structure, forming an opening through the dielectric layer to the dummy structure, and removing the dummy structure to form the dielectric chamber. |
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| AbstractList | A method (and structure) that selectively forms a dielectric chamber on an electronic device by forming a dummy structure over a semiconductor substrate, depositing a dielectric layer over the dummy structure, forming an opening through the dielectric layer to the dummy structure, and removing the dummy structure to form the dielectric chamber. |
| Author | JOSHI RAJIV V HSU LOUIS L FENG GEORGE C |
| Author_xml | – fullname: JOSHI RAJIV V – fullname: HSU LOUIS L – fullname: FENG GEORGE C |
| BookMark | eNqNiz0LwjAURTPo4Nd_eOAstEopHUUU9-pc4sutDaQvJU39_Vp1dHC4XDicM1cT8YKZcmUMA8chgLQYahEbb6j2YVxr5U6ajIUDx2CZuNHtDeHtfqCXFzZ4WAZZYTeYMYoNfmRLNa2167H6_kKtT8fL4bxB5yv0nWYIYnUtt0mSpUVR5Pk-3f1nPQGWqESj |
| ContentType | Patent |
| DBID | EVB |
| DatabaseName | esp@cenet |
| DatabaseTitleList | |
| Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Medicine Chemistry Sciences |
| Edition | 7 |
| ExternalDocumentID | US2005199977A1 |
| GroupedDBID | EVB |
| ID | FETCH-epo_espacenet_US2005199977A13 |
| IEDL.DBID | EVB |
| IngestDate | Fri Jul 19 15:15:21 EDT 2024 |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | false |
| Language | English |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-epo_espacenet_US2005199977A13 |
| Notes | Application Number: US20050129325 |
| OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20050915&DB=EPODOC&CC=US&NR=2005199977A1 |
| ParticipantIDs | epo_espacenet_US2005199977A1 |
| PublicationCentury | 2000 |
| PublicationDate | 20050915 |
| PublicationDateYYYYMMDD | 2005-09-15 |
| PublicationDate_xml | – month: 09 year: 2005 text: 20050915 day: 15 |
| PublicationDecade | 2000 |
| PublicationYear | 2005 |
| RelatedCompanies | INTERNATIONAL BUSINESS MACHINES CORPORATION |
| RelatedCompanies_xml | – name: INTERNATIONAL BUSINESS MACHINES CORPORATION |
| Score | 2.632367 |
| Snippet | A method (and structure) that selectively forms a dielectric chamber on an electronic device by forming a dummy structure over a semiconductor substrate,... |
| SourceID | epo |
| SourceType | Open Access Repository |
| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| Title | Structure and method for forming a dielectric chamber and electronic device including the dielectric chamber |
| URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20050915&DB=EPODOC&locale=&CC=US&NR=2005199977A1 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1LS8NAEB5KFfWmVfFRZUHJLdhHHuYQxOZBEfrANNJb2U22GIhpsS3-fWe2je1BegiEbLJsBmbnm92d7wN4bAguW6lA5GZIRzdsw9G5LVKdlOAtIkfhgnZ0e32rGxtvY3NcgbyshVE8oT-KHBE9KkF_X6r5er5dxPLV2crFk8jw0ewlHLm-VmbHFP5Mze-4wXDgDzzN89w40vrvqo0q7m37FXOlAwLSxLQffHSoLmW-G1TCUzgcYn_F8gwqsqjBsVdqr9XgqLfZ8sbbjfctziGPFNnr6lsyzP_ZWvyZIeqk6wtjEOMszdbCNlnCkk9Oah_q3a3aDUslTQ4sK5J8RYGLIQT857MLeAiDkdfVcdiTPytN4mj3H9uXUC1mhbwCJp-dFp9ybiQmNxrCcpJ2W9gmnzZTiXijeQ31fT3d7G--hRPFZkqqCmYdqmgIeYdxeinulXl_ASELmO4 |
| link.rule.ids | 230,309,786,891,25594,76904 |
| linkProvider | European Patent Office |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3fT8IwEL4QNOKbosYfqE00e1sE1jH3QIxsI6gwiAPD29JuJS6ZgwjEf99rYcKD4WHJsm5Nd8n1u2t73wdwX-VM1GOOkRsVtk4tauvM4rEuleAbkhyFcbmj2_MbnRF9HZvjAqR5LYziCf1R5IjoURH6-0LN17PNIparzlbOH3iCj6ZP7WHT1fLsWMKfqbmtpjfou31Hc5zmKND8d9UmK-4t6xlzpT0Lk0LJtO99tGRdymwbVNpHsD_A_rLFMRREVoaSk2uvleGgt97yxtu1981PIA0U2evyWxDM_8lK_Jlg1CmvL8QgwkicrIRtkohEn0yqfah3N2o3JBZyciBJFqVLCVwEQ8B_PjuFu7Y3dDo6Djv8s1I4Crb_0TiDYjbNxDkQ8WjX2YQxGpmMVnnDjgyDWyab1GKB8UbtAiq7errc3XwLpc6w1w27L_7bFRwqZlOpsGBWoIhGEdeI2Qt-o0z9C26im9k |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Structure+and+method+for+forming+a+dielectric+chamber+and+electronic+device+including+the+dielectric+chamber&rft.inventor=JOSHI+RAJIV+V&rft.inventor=HSU+LOUIS+L&rft.inventor=FENG+GEORGE+C&rft.date=2005-09-15&rft.externalDBID=A1&rft.externalDocID=US2005199977A1 |