Self-alignment scheme for enhancement of CPP-GMR
A method for fabricating a current-perpendicular-to-plane (CPP) giant magnetoresistive (GMR) sensor of the synthetic spin valve type is provided, the method including an electron-beam lithographic process employing both primary and secondary electron absorption and first and second self-aligned lift...
Saved in:
| Main Authors | , , , |
|---|---|
| Format | Patent |
| Language | English |
| Published |
26.05.2005
|
| Edition | 7 |
| Subjects | |
| Online Access | Get full text |
Cover
Loading…
| Abstract | A method for fabricating a current-perpendicular-to-plane (CPP) giant magnetoresistive (GMR) sensor of the synthetic spin valve type is provided, the method including an electron-beam lithographic process employing both primary and secondary electron absorption and first and second self-aligned lift-off processes for patterning the capped ferromagnetic free layer and the conducting, non-magnetic spacer layer. The sensor so fabricated has reduced resistance and increased sensitivity. |
|---|---|
| AbstractList | A method for fabricating a current-perpendicular-to-plane (CPP) giant magnetoresistive (GMR) sensor of the synthetic spin valve type is provided, the method including an electron-beam lithographic process employing both primary and secondary electron absorption and first and second self-aligned lift-off processes for patterning the capped ferromagnetic free layer and the conducting, non-magnetic spacer layer. The sensor so fabricated has reduced resistance and increased sensitivity. |
| Author | CHEN CHAO-PENG CHANG JEI-WEI LI MIN JU KOCHAN |
| Author_xml | – fullname: LI MIN – fullname: CHEN CHAO-PENG – fullname: JU KOCHAN – fullname: CHANG JEI-WEI |
| BookMark | eNrjYmDJy89L5WQwCE7NSdNNzMlMz8tNzStRKE7OSM1NVUjLL1JIzctIzEtOBQvnpyk4BwTouvsG8TCwpiXmFKfyQmluBmU31xBnD93Ugvz41OKCxOTUvNSS-NBgIwMDU0MgMDF2NDQmThUAoPAs0A |
| ContentType | Patent |
| DBID | EVB |
| DatabaseName | esp@cenet |
| DatabaseTitleList | |
| Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Medicine Chemistry Sciences Physics |
| Edition | 7 |
| ExternalDocumentID | US2005111143A1 |
| GroupedDBID | EVB |
| ID | FETCH-epo_espacenet_US2005111143A13 |
| IEDL.DBID | EVB |
| IngestDate | Fri Jul 19 11:46:14 EDT 2024 |
| IsOpenAccess | true |
| IsPeerReviewed | false |
| IsScholarly | false |
| Language | English |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-epo_espacenet_US2005111143A13 |
| Notes | Application Number: US20030718372 |
| OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20050526&DB=EPODOC&CC=US&NR=2005111143A1 |
| ParticipantIDs | epo_espacenet_US2005111143A1 |
| PublicationCentury | 2000 |
| PublicationDate | 20050526 |
| PublicationDateYYYYMMDD | 2005-05-26 |
| PublicationDate_xml | – month: 05 year: 2005 text: 20050526 day: 26 |
| PublicationDecade | 2000 |
| PublicationYear | 2005 |
| RelatedCompanies | HEADWAY TECHNOLOGIES, INC |
| RelatedCompanies_xml | – name: HEADWAY TECHNOLOGIES, INC |
| Score | 2.5778687 |
| Snippet | A method for fabricating a current-perpendicular-to-plane (CPP) giant magnetoresistive (GMR) sensor of the synthetic spin valve type is provided, the method... |
| SourceID | epo |
| SourceType | Open Access Repository |
| SubjectTerms | GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER PHYSICS TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS |
| Title | Self-alignment scheme for enhancement of CPP-GMR |
| URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20050526&DB=EPODOC&locale=&CC=US&NR=2005111143A1 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfR3LSsNAcCj1edOo-KgSUHIL5rnpJYjNwyKkDU0jvZU8dqtQk2Ii_r6zS6s9FZY9zMAwu8vszOw8FuBBIwUtmV2qOs6qVTpU7WfEQoknrHQYyw2dFydHIzJMrdeZPevAclMLI_qE_ojmiChRBcp7K-7r1f8jli9yK5vH_ANB9VM4dX1l4x3zb9mI4g_cIB77Y0_xPDdNlNFE4PjtYJnP6CvtGbZJeAJg8DbgdSmrbaUSnsB-jPSq9hQ6tJLgyNv8vSbBYbQOeUtwIHI0iwaBazlszkBL6JKpaEIvRDBfRheVflIZDVCZVu_8IAW4ZrIXx-pLNDmH-zCYekMVmZj_rXmeJtscmxfQreqKXoJsZxnJnMwoLBy8zJQ_YzKbkbzvmIWeXUFvF6Xr3egbOBa9STWe-taDbvv1TW9R67b5ndisXxzwhGI |
| linkProvider | European Patent Office |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dS8MwED_G_JhvOpWpUwtK34rd1qZ7KeL6YdW1K2snexv9SFSY3bAV_30vYdM9DUIeLnBcEn65u-TuAnCrkozmTM-VDvaKlhtU6SdEQ8QTlhuMpd0OT072A-JNtOepPq3BfJ0LI-qE_ojiiIioDPFeifN6-X-JZYvYyvIu_UDS4t6NTVtee8f8WzYi2wPTCUf2yJIty5xEcjAWY_x00HoP6CvtIKpUHgDovA54XspyU6m4h7AbIr-iOoIaLZrQsNZ_rzVh3189eTdhT8RoZiUSVzgsj0GN6JwpaEK_icd8CV1U-kklNEAlWrzzjRTkBZOsMFQe_fEJ3LhObHkKCjH7m_NsEm1K3DuFerEoaAskPUlIYiTdTMPG00z5NSbTGUn7Ri_rJGfQ3sbpfPvwNTS82B_Ohk_BywUciDqlKg-Da0O9-vqml6iBq_RKLNwvcomHTA |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Self-alignment+scheme+for+enhancement+of+CPP-GMR&rft.inventor=LI+MIN&rft.inventor=CHEN+CHAO-PENG&rft.inventor=JU+KOCHAN&rft.inventor=CHANG+JEI-WEI&rft.date=2005-05-26&rft.externalDBID=A1&rft.externalDocID=US2005111143A1 |