MEMS structure with raised electrodes

• Main Authors: STAKER BRYAN P, FERNANDEZ ANDRES, MURAY LAWRENCE P
• Format: Patent
• Language: English
• Published: 20.05.2004
• Edition: 7
• Subjects: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PERFORMING OPERATIONS; PHYSICS; TRANSPORTING

In an electrostatically controlled deflection apparatus, such as a MEMS array having cavities formed around electrodes and which is mounted directly on a dielectric or controllably resistive substrate in which are embedded electrostatic actuation electrodes disposed in alignment with the individual...