Plasma excitation coil
A spiral-like multi-turn coil excites a plasma for treating a workpiece in a vacuum plasma processor. In one embodiment two of the turns have a discontinuity. Each discontinuity has a capacitor connected across it. An RF source drives the coil via a matching network, an inductor connected to one coi...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
02.01.2003
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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