Thin-film patterning method, manufacturing method of thin-film device and manufacturing method of thin-film magnetic head
At least one strippable film on a surface of a thin film to be patterned is formed, then the at least one strippable film and the thin film to be patterned is patterned by using FIB, and thereafter the at least one strippable film is removed.
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Main Author | |
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Format | Patent |
Language | English |
Published |
04.10.2001
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Edition | 7 |
Subjects | |
Online Access | Get full text |
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