Long short-term memory anomaly detection for multi-sensor equipment monitoring

• Main Authors: Didari, Sima, Liao, Tianqing, Rajagopal, Harikrishnan
• Format: Patent
• Language: English
• Published: 20.08.2024
• Subjects: CALCULATING; COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS; COMPUTING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; PHYSICS

Methods, systems, and non-transitory computer readable medium are provided for long short-term memory (LSTM) anomaly detection for multi-sensor equipment monitoring. A method includes training a LSTM recurrent neural network (RNN) model for semiconductor processing fault detection. The training incl...