Semiconductor device and method of forming vertical structure
According to an exemplary embodiment, a method of forming a vertical structure is provided. The method includes the following operations: providing a substrate; providing the vertical structure having a source, a channel, and a drain over the substrate; shrinking the source and the channel by oxidat...
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| Main Authors | , , , , |
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| Format | Patent |
| Language | English |
| Published |
13.08.2024
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| Subjects | |
| Online Access | Get full text |
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| Abstract | According to an exemplary embodiment, a method of forming a vertical structure is provided. The method includes the following operations: providing a substrate; providing the vertical structure having a source, a channel, and a drain over the substrate; shrinking the source and the channel by oxidation; forming a metal layer over the drain of the vertical structure; and annealing the metal layer to form a silicide over the drain of the vertical structure. |
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| AbstractList | According to an exemplary embodiment, a method of forming a vertical structure is provided. The method includes the following operations: providing a substrate; providing the vertical structure having a source, a channel, and a drain over the substrate; shrinking the source and the channel by oxidation; forming a metal layer over the drain of the vertical structure; and annealing the metal layer to form a silicide over the drain of the vertical structure. |
| Author | Lan, Wen-Ting Yang, Kai-Chieh Wang, Chih-Hao Lien, Wai-Yi Ju, Shi-Ning |
| Author_xml | – fullname: Yang, Kai-Chieh – fullname: Lien, Wai-Yi – fullname: Ju, Shi-Ning – fullname: Wang, Chih-Hao – fullname: Lan, Wen-Ting |
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| Notes | Application Number: US202017106933 |
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| RelatedCompanies | TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD |
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| Snippet | According to an exemplary embodiment, a method of forming a vertical structure is provided. The method includes the following operations: providing a... |
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| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| Title | Semiconductor device and method of forming vertical structure |
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