Component for use in a lithographic apparatus, method of protecting a component and method of protecting tables in a lithographic apparatus
A method of protecting a component of a lithographic apparatus, the method including the steps of: providing a protective cover which is shaped to protect at least part of said component, the protective cover having a contact surface which is arranged to adhere to a first surface of at least part of...
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Main Author | |
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Format | Patent |
Language | English |
Published |
04.06.2024
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Subjects | |
Online Access | Get full text |
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