Substrate processing apparatus and method of fabricating semiconductor device using the same
A substrate processing apparatus includes a photoresist coater applying a photoresist film on a substrate, a humidifier increasing an amount of moisture in an ambient to which the photoresist film on the substrate is exposed, and an exposer irradiating the photoresist film exposed to the ambient hav...
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| Main Authors | , , , , , , , , |
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| Format | Patent |
| Language | English |
| Published |
12.03.2024
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| Subjects | |
| Online Access | Get full text |
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| Abstract | A substrate processing apparatus includes a photoresist coater applying a photoresist film on a substrate, a humidifier increasing an amount of moisture in an ambient to which the photoresist film on the substrate is exposed, and an exposer irradiating the photoresist film exposed to the ambient having the increased amount of moisture with light. The humidifier is disposed between the photoresist coater and the exposer. |
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| AbstractList | A substrate processing apparatus includes a photoresist coater applying a photoresist film on a substrate, a humidifier increasing an amount of moisture in an ambient to which the photoresist film on the substrate is exposed, and an exposer irradiating the photoresist film exposed to the ambient having the increased amount of moisture with light. The humidifier is disposed between the photoresist coater and the exposer. |
| Author | Kim, Dong-Wook Seo, Kyung Won Hong, Sang Joon Jang, Young Il Kang, Kyung-Won Koh, Cha Won Kim, Hyun Woo Heo, Seok Choi, Yong Suk |
| Author_xml | – fullname: Heo, Seok – fullname: Kang, Kyung-Won – fullname: Hong, Sang Joon – fullname: Choi, Yong Suk – fullname: Kim, Hyun Woo – fullname: Kim, Dong-Wook – fullname: Koh, Cha Won – fullname: Seo, Kyung Won – fullname: Jang, Young Il |
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| Notes | Application Number: US202217892379 |
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| RelatedCompanies | Samsung Electronics Co., Ltd |
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| Snippet | A substrate processing apparatus includes a photoresist coater applying a photoresist film on a substrate, a humidifier increasing an amount of moisture in an... |
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| SubjectTerms | APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES |
| Title | Substrate processing apparatus and method of fabricating semiconductor device using the same |
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