Substrate treatment apparatus
A substrate treatment apparatus is provided. The substrate treatment apparatus includes a substrate support part provided with a seating surface and configured to support a substrate, a guide ring annularly disposed along an edge of the substrate support part to surround the substrate, and a centeri...
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| Main Authors | , , , , , |
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| Format | Patent |
| Language | English |
| Published |
26.09.2023
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| Subjects | |
| Online Access | Get full text |
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| Abstract | A substrate treatment apparatus is provided. The substrate treatment apparatus includes a substrate support part provided with a seating surface and configured to support a substrate, a guide ring annularly disposed along an edge of the substrate support part to surround the substrate, and a centering part provided inside the guide ring and configured to center the substrate by moving in a direction parallel to the seating surface to pressurize the edge of the substrate. |
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| AbstractList | A substrate treatment apparatus is provided. The substrate treatment apparatus includes a substrate support part provided with a seating surface and configured to support a substrate, a guide ring annularly disposed along an edge of the substrate support part to surround the substrate, and a centering part provided inside the guide ring and configured to center the substrate by moving in a direction parallel to the seating surface to pressurize the edge of the substrate. |
| Author | Kim, Byoung Ok Seo, Jun Ho Eum, Ki Sang Kim, Ju Eun Jeong, Jae Hun Kang, Man Kyu |
| Author_xml | – fullname: Eum, Ki Sang – fullname: Jeong, Jae Hun – fullname: Kim, Byoung Ok – fullname: Kang, Man Kyu – fullname: Seo, Jun Ho – fullname: Kim, Ju Eun |
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| Notes | Application Number: US201916693569 |
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| PublicationDateYYYYMMDD | 2023-09-26 |
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| RelatedCompanies | SEMES CO., LTD |
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| Snippet | A substrate treatment apparatus is provided. The substrate treatment apparatus includes a substrate support part provided with a seating surface and configured... |
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| SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FORFASTENING, CONNECTING, DISENGAGING OR HOLDING TRANSPORTING |
| Title | Substrate treatment apparatus |
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