Charged particle beam device and axis adjustment method thereof
A charged particle beam device is provided in which axis adjustment as a superimposing lens is facilitated by aligning an axis of an electrostatic lens resulting from a deceleration electric field with an axis of a magnetic field lens. The charged particle beam device includes: an electron source; a...
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Format | Patent |
Language | English |
Published |
19.09.2023
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Subjects | |
Online Access | Get full text |
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Abstract | A charged particle beam device is provided in which axis adjustment as a superimposing lens is facilitated by aligning an axis of an electrostatic lens resulting from a deceleration electric field with an axis of a magnetic field lens. The charged particle beam device includes: an electron source; an objective lens that focuses a probe electron beam from the electron source on a sample; a first beam tube and a second beam tube through each of which the probe electron beam passes; a deceleration electrode arranged between the first beam tube and a sample; a first voltage source that forms a deceleration electric field for the probe electron beam between the first beam tube and the deceleration electrode by applying a first potential to the first beam tube; and a first moving mechanism that moves a position of the first beam tube. |
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AbstractList | A charged particle beam device is provided in which axis adjustment as a superimposing lens is facilitated by aligning an axis of an electrostatic lens resulting from a deceleration electric field with an axis of a magnetic field lens. The charged particle beam device includes: an electron source; an objective lens that focuses a probe electron beam from the electron source on a sample; a first beam tube and a second beam tube through each of which the probe electron beam passes; a deceleration electrode arranged between the first beam tube and a sample; a first voltage source that forms a deceleration electric field for the probe electron beam between the first beam tube and the deceleration electrode by applying a first potential to the first beam tube; and a first moving mechanism that moves a position of the first beam tube. |
Author | Sasajima, Masahiro Takahoko, Yoshihiro Imai, Yuta |
Author_xml | – fullname: Takahoko, Yoshihiro – fullname: Sasajima, Masahiro – fullname: Imai, Yuta |
BookMark | eNqNyrsOAUEUBuApKNze4XgAiV2CTmJD9Kg3x8y_ZmTnkplDPL7GA6i-5hurQYgBI7VvLOcHDCXO4nQPuoM9GbydBnEwxB9XiM3zVcQjCHmIjYbEIiN2UzXsuC-Y_Zyo-el4bc4LpNiiJNYIkPZ2qartZr2sd4d69c_5AouRMq4 |
ContentType | Patent |
DBID | EVB |
DatabaseName | esp@cenet |
DatabaseTitleList | |
Database_xml | – sequence: 1 dbid: EVB name: esp@cenet url: http://worldwide.espacenet.com/singleLineSearch?locale=en_EP sourceTypes: Open Access Repository |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Medicine Chemistry Sciences |
ExternalDocumentID | US11764028B2 |
GroupedDBID | EVB |
ID | FETCH-epo_espacenet_US11764028B23 |
IEDL.DBID | EVB |
IngestDate | Fri Jul 19 12:44:01 EDT 2024 |
IsOpenAccess | true |
IsPeerReviewed | false |
IsScholarly | false |
Language | English |
LinkModel | DirectLink |
MergedId | FETCHMERGED-epo_espacenet_US11764028B23 |
Notes | Application Number: US201817056993 |
OpenAccessLink | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230919&DB=EPODOC&CC=US&NR=11764028B2 |
ParticipantIDs | epo_espacenet_US11764028B2 |
PublicationCentury | 2000 |
PublicationDate | 20230919 |
PublicationDateYYYYMMDD | 2023-09-19 |
PublicationDate_xml | – month: 09 year: 2023 text: 20230919 day: 19 |
PublicationDecade | 2020 |
PublicationYear | 2023 |
RelatedCompanies | Hitachi High-Tech Corporation |
RelatedCompanies_xml | – name: Hitachi High-Tech Corporation |
Score | 3.500379 |
Snippet | A charged particle beam device is provided in which axis adjustment as a superimposing lens is facilitated by aligning an axis of an electrostatic lens... |
SourceID | epo |
SourceType | Open Access Repository |
SubjectTerms | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY |
Title | Charged particle beam device and axis adjustment method thereof |
URI | https://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230919&DB=EPODOC&locale=&CC=US&NR=11764028B2 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dS8MwED_GFPVNp6LzgwjSt2Kr69dDGfSLIewDt8neRtKkYwPbYTv0z_cSO-eLvoUELskdv_tILheAeypQLRqU6p7DmS5dap2iodcxNEBxW6mVqWr7_YHdm3aeZ9asAavtWxhVJ_RDFUdERKWI90rp6_XuECtSuZXlA1tiV9FNJn6k1dEx-tM4hxYFfjwaRsNQC0N_OtYGL75pOjaGSm6A6npPutGyzn78GshXKevfJiU5hv0RUsurE2iIvAWH4fbntRYc9OsLb2zW2CtPoStvxheCk3UtbcIEfSNcSKwTmnNCP5cloXy1KVXqOPn-HZpIF08U2RncJfEk7Om4kvnPtufT8W7RT-fQzItcXABJKWMmd21uMd7x3MwzBMaZKTdS6jxa3L2E9t902v8NXsGRZKHMhjC9a2hW7xtxgya3YreKV1-mcoX0 |
link.rule.ids | 230,309,786,891,25594,76904 |
linkProvider | European Patent Office |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3dS8MwED_GFOebTkXnVwTpW3F169o-lEHbjan7wm2yt5E0qWxgW2yH_vleYud80beQQD4u3Mcvd7kDuKUCxWKdUt2xONOlSa1TVPQ6QgO8bjM0I5VtfzBs9WbNx7k5L8Fq8xdG5Qn9UMkRkaNC5Pdcyet0-4gVqNjK7I4tsStpd6duoBXoGO1pXEMLPLczHgUjX_N9dzbRhs-uYVgthEq2h-J6x0JIKPPsd148-Ssl_a1SugewO8bZ4vwQSiKuQsXfVF6rwt6gcHhjs-C97Aja0jP-KjhJi9smTNA3woXkdUJjTujnMiOUr9aZCh0n39WhiTTxRBIdw023M_V7Ou5k8XPsxWyy3XTjBMpxEotTICFlzOB2i5uMNx07cuoCcWbI6yG17k1un0Ht73lq_w1eQ6U3HfQX_Yfh0znsS3LKyAjDuYBy_r4Wl6h-c3al6PYFD-6I3w |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Apatent&rft.title=Charged+particle+beam+device+and+axis+adjustment+method+thereof&rft.inventor=Takahoko%2C+Yoshihiro&rft.inventor=Sasajima%2C+Masahiro&rft.inventor=Imai%2C+Yuta&rft.date=2023-09-19&rft.externalDBID=B2&rft.externalDocID=US11764028B2 |