Process tool and an inspection method
A process tool for processing production substrates, the process tool including: a movable stage configured to perform long-stroke movements in an X-Y plane; an imaging device mounted to a fixed part of the tool and having an optical axis substantially parallel to the X-Y plane; and a mirror mounted...
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Main Authors | , , , , |
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Format | Patent |
Language | English |
Published |
08.08.2023
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Subjects | |
Online Access | Get full text |
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