Reducing speckle in an excimer light source
A method includes: producing a light beam made up of pulses having a wavelength in the deep ultraviolet range, each pulse having a first temporal coherence defined by a first temporal coherence length and each pulse being defined by a pulse duration; for one or more pulses, modulating the optical ph...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
27.06.2023
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Subjects | |
Online Access | Get full text |
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