Multi-stage, multi-zone substrate positioning systems

• Main Authors: Laske, Frank, Gutman, Nadav, Hildesheim, Ariel, Uziel, Yoram, Pohlmann, Ulrich, Balan, Aviv
• Format: Patent
• Language: English
• Published: 25.04.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

A first x-y translation stage, a second x-y translation stage, and a chuck are disposed in a chamber. The chuck is situated above and coupled to the second x-y translation stage, which is situated above and coupled to the first x-y translation stage. The chuck is configured to support a substrate an...