RF power delivery architecture with switchable match and frequency tuning

• Main Authors: Dzilno, Dmitry A, Trachuk, Yury, Hammond, IV, Edward P
• Format: Patent
• Language: English
• Published: 11.04.2023
• Subjects: AMPLIFIERS; BASIC ELECTRIC ELEMENTS; BASIC ELECTRONIC CIRCUITRY; CONTROLLING; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; PHYSICS; REGULATING; RESONATORS; SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES

A power supply circuit includes a switchable match, including a high voltage bus connectable to a load, a low voltage bus connectable to the load such that the load is in series between the high voltage bus and the low voltage bus, at least two capacitors having a fixed value of capacitance selectively connectable between the high voltage bus and the low voltage bus and a plurality of solid state switches equal in number to the number of capacitors having a fixed value of capacitance connectable between the high voltage bus and the low voltage bus, each switch configured and arranged to selectively connect or disconnect one of the capacitors having a fixed value of capacitance selectively connectable between the high voltage bus and the low voltage bus into electrical communication between the high voltage bus and the low voltage bus, and a variable frequency power supply including a high voltage output connection, the high voltage connection connected to the high voltage bus.